Work

Enhancing defect detection in semiconductor manufacturing through physics-based synthetic imaging for micro- and nano-scale structures

Year: 2025

Type: conference-paper

DOI: 10.1117/12.3051202

Authors: Chao-Ching Ho, Wei-Cheng Chiang, Eugene Su

Language: English

Topic: Industrial Vision Systems and Defect Detection

Subfield: Industrial and Manufacturing Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

OpenAlex ID: W4407833505

FWCI:

Cites: 3

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Related to: 10