Overlay and wafer stress control in semiconductor manufacturing
Year: 2025
Type: conference-paper
DOI: 10.1117/12.3051166
Authors: Pradeep Subrahmanyan, Ram Karur, Wonjae Lee, Olga Kucher, Hsiang Yu Lee, Adaeze Osonkie, Djaya Salim, Li Y. Li, Thomas Lee, Kang K. Tan
Institutions: Applied Materials (United States), Micron (Singapore)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4407833725