Work

FIB/SEM for inline 3D metrology and defect analysis

Year: 2025

Type: conference-paper

DOI: 10.1117/12.3051211

Authors: Mark Najarian, Gavin Mitchson, Pete Carleson, Ivy Wu, Laura Zhu

Institution: Thermo Fisher Scientific (United States)

Language: English

Topic: Ion-surface interactions and analysis

Subfield: Computational Mechanics

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4407833843

FWCI:

Cites: 5

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Related to: 10