Foundation deep learning model for accurate SEM image segmentation for CD-SEM measurements
Year: 2025
Type: conference-paper
DOI: 10.1117/12.3050983
Authors: Eva Seknazi, Elad Yoshai, Angela Kravstov, Rotem Mor Yosef, Anna Levant
Institution: Applied Materials (Israel)
Language: English
Subfield: Computer Vision and Pattern Recognition
Field: Computer Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4407833858