3D reconstruction of 3D NAND memory etch profiles using FIB-SEM: identifying variances in etched hole patterns
Year: 2025
Type: conference-paper
DOI: 10.1117/12.3051156
Authors: Jin Zhang, Keumsil Lee, Dmitry Klochkov, Thomas Korb, Osman Sorkhabi, Tian Tian Lan, Ramani Pichumani, Kina Tekleyohannes, Junyu Wang, Shawn Sallis, Sean Ningen, HyunHwa Kim, Tiffany Teoh, Yevgen Polubotko, David Pirkle, Eugen Foca
Institutions: Lam Research (United States), Carl Zeiss (United States)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4407833909