Work

Fabrication of periodic fringe pattern of high spatial frequency for visible light lithography using dual aperture compact holographic lens system

Year: 2025

Type: conference-paper

Source: SPIE Novel Patterning Technologies

DOI: 10.1117/12.3051450

Authors: Shweta Yadav, Rashmi Sinha, Nirmalendu Deo, Hira Lal Yadav

Institutions: Maulana Azad National Institute of Technology, Next Generation Technology (United States)

Language: English

Topic: Advanced optical system design

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4407833951

FWCI:

Cites: 8

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Related to: 10