Work

SiliconBASE: multi-task baseline model for semiconductor metrology and inspection applications

Year: 2025

Type: conference-paper

DOI: 10.1117/12.3050285

Authors: Yonghyun Kim, Jihyung Ko, Sally Shin, Sang-Gil Park, Il Koo Kim

Language: English

Topic: Industrial Vision Systems and Defect Detection

Subfield: Industrial and Manufacturing Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

OpenAlex ID: W4407834061

FWCI:

Cites: 14

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Related to: 10