Novel wet cleaning solutions for EUV masks
Year: 2025
Type: conference-paper
DOI: 10.1117/12.3051019
Authors: Bong-Kyun Kang, Hyemin Lee, Chia-Wei Wang, Ching-Yu Yang, Pen-Nan Liao, Seok-Heon Jung, Wonwook Lee, Dongwook Lee, Suwoong Kim, Eunhee Han, Jae Hyun Kim
Institution: SK Hynix (South Korea)
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4407834092