Work

The Dynamic Characteristics of a Mode-Localized Resonant Accelerometer

Year: 2025

Type: article

Source: Journal of Microelectromechanical Systems

DOI: 10.1109/jmems.2025.3541581

Authors: Bowen Wang, Kunfeng Wang, Zhenxiang Qi, Zhaoyang Zhai, Zheng Wang, Xudong Zou

Institutions: Chinese Academy of Sciences, State Key Laboratory of Transducer Technology, Aerospace Information Research Institute

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: Chinese Academy of Sciences, National Key Research and Development Program of China, Key Research Program of Frontier Science, Chinese Academy of Sciences

Awards: G4731519770, G5547927136, G5672258570

OpenAlex ID: W4407948515

FWCI: 0.924

Cites: 25

Cited by: 4

Related to: 10