Work

High Electromechanical Coupling Radial Extension Mode Resonators Realized in Al 0.7 Sc 0.3 N

Year: 2025

Type: article

Source: Journal of Microelectromechanical Systems

DOI: 10.1109/jmems.2025.3542363

Authors: Xu Zhao, Rossiny Beaucejour, Xingyu Du, Abhay Kochhar, Mojtaba Hodjat-Shamami, Craig Moe, Ramakrishna Vetury, Roy H. Olsson

Institution: University of Pennsylvania

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Defense Advanced Research Projects Agency

Award: G6635528516

OpenAlex ID: W4407948648

FWCI: 0.964

Cites: 13

Cited by: 4

Related to: 10