Work

A Material Removal Rate Prediction Model for High-Shear and Low-Pressure Grinding of Single Crystal Silicon

Year: 2025

Type: article

Source: Journal of Manufacturing Science and Engineering

DOI: 10.1115/1.4068068

Authors: Yebing Tian, Shuangchen Zhao, Guoyu Zhang, Pengzhan Wang, Shuang Liu

Institution: Shandong University of Technology

Language: English

Topic: Advanced Surface Polishing Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Natural Science Foundation of China, Natural Science Foundation of Shandong Province

Awards: G1177139845, G457857895

OpenAlex ID: W4407954211

FWCI: 0.964

Cites: 41

Cited by: 4

Related to: 10