Work

Flow structure and agitation effect of liquid film flow formed by the two-fluid jet: prediction of etching rate distribution in wet processing

Year: 2025

Type: article

Source: Japanese Journal of Applied Physics

DOI: 10.35848/1347-4065/adba67

Authors: Shinsuke Watanabe, Naoto Doi, Hiroki Takahashi, Masayoshi Imai, Toshiyuki Sanada

Institutions: Shizuoka University, Ebara (Japan)

Language: English

Topic: Fluid Dynamics and Heat Transfer

Subfield: Computational Mechanics

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4407960806

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Cites: 30

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Related to: 10