Work

Smartification of Control Technology in Semiconductor Equipment

Year: 2025

Type: article

Source: IEEJ Transactions on Electronics Information and Systems

DOI: 10.1541/ieejeiss.145.281

Authors: Masato Tanaka, Manabu Hamaguchi

Institutions: Azbil (Japan), Mitsubishi Electric (Japan)

Language: English

Topic: Advanced Sensor and Control Systems

Subfield: Control and Systems Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

OpenAlex ID: W4408057036

FWCI:

Cites: 1

Cited by:

Related to: 10