Work

Structural, electrical, and thermal characterization of homoepitaxial close-injection showerhead metalorganic chemical vapor deposition β-Ga2O3 enhancement-mode recessed-gate MOSFETs

Year: 2025

Type: article

Source: Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

DOI: 10.1116/6.0004176

Authors: Hannah N. Masten, Gustavo Armando Alvarez, Corey Halverson, Joyce Christiansen-Salameh, Eugene Y. Kwon, Michael Liao, James Spencer Lundh, Audrey Rose Gutierrez, Fikadu Alema, Andrei Osinsky, Alan G. Jacobs, Mark S. Goorsky, Marc H. Weber, Zhiting Tian, Karl D. Hobart, Marko J. Tadjer

Institutions: National Academies of Sciences, Engineering, and Medicine, Cornell University, Washington State University, University of California, Los Angeles, Chester County Historical Society, EA Technology, United States Naval Research Laboratory, Agnitron Technology (United States)

Language: English

Topic: Ga2O3 and related materials

Subfield: Electronic, Optical and Magnetic Materials

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

Funders: Office of Naval Research, National Science Foundation Graduate Research Fellowship Program

Awards: G1230108060, G1803745395, G6518533451

OpenAlex ID: W4408060702

FWCI: 0.479

Cites: 57

Cited by: 3

Related to: 10