Work

Effect of Vanadium Trioxide Catalyst on the Chemical Mechanical Polishing Performance on SiC–Si Facets

Year: 2025

Type: article

Source: ECS Journal of Solid State Science and Technology

DOI: 10.1149/2162-8777/adbb8d

Authors: Zehao Yue, Chong Luo, Chenwei Wang, Jianwei Zhou, Wenbo Liu

Language: English

Topic: Advanced Surface Polishing Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: Hebei University of Technology

OpenAlex ID: W4408060916

FWCI: 0.721

Cites: 38

Cited by: 3

Related to: 10