Self-Forming Silicon Nitride Nanomask and Its Applications
Year: 2024
Type: article
Authors: V. K. Smirnov, D. S. Kibalov, P. A. Lepshin, I. V. Zhuravlev, G. F. Smirnova
Institutions: Russian Academy of Sciences, Kurchatov Institute
Language: English
Subfield: Computational Mechanics
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4408075769