Controlled Nanostructuring of Thin Films by Oblique Angle Deposition
Year: 2024
Type: article
Authors: O. S. Trushin, I. S. Fattakhov, M. M. Chebokhin, A. A. Popov, L. A. Mazaletskiy
Language: English
Subfield: Surfaces, Coatings and Films
Field: Materials Science
Domain: Physical Sciences
Open Access status: closed
OpenAlex ID: W4408075774
