Work

Study of Zinc Implanted Silicon Nitride Film

Year: 2024

Type: article

Source: Journal of Surface Investigation X-ray Synchrotron and Neutron Techniques

DOI: 10.1134/s1027451024701519

Authors: V. V. Privezentsev, A. A. Firsov, V. S. Kulikauskas, D. A. Kiselev, B. R. Senatulin

Institutions: Russian Academy of Sciences, Institute for Systems Analysis, Research Institute for System Studies, Lomonosov Moscow State University, Skobeltsyn Institute of Nuclear Physics, Lomonosov Moscow State University, National University of Science and Technology

Language: English

Topic: Ion-surface interactions and analysis

Subfield: Computational Mechanics

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4408075898

FWCI:

Cites: 16

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Related to: 10