Work

Investigation on properties of the TiSiN/TiSi-diamondlike carbon multilayer coatings prepared by hybrid deposition technique

Year: 2025

Type: article

Source: Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

DOI: 10.1116/6.0004356

Authors: Menghui Chen, Mai Yang, Tao Huang, Yibing Su, Yuzhe Han, Qizhong Li, Meijun Yang, Song Zhang, Takashi Goto, Rong Tu

Institutions: Wuhan University of Technology, State Key Laboratory of Advanced Technology For Materials Synthesis and Processing, Tohoku University

Language: English

Topic: Metal and Thin Film Mechanics

Subfield: Mechanics of Materials

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Natural Science Foundation of China, Higher Education Discipline Innovation Project

Awards: G1929686293, G3693960443, G6922898204, 硬质刀具涂层的连续/脉冲型双激光化学气相沉积机理研究, G8255658097, 连续激光化学气相沉积立方碳化硅的显微结构控制与生长机理研究

OpenAlex ID: W4408115354

FWCI: 0.329

Cites: 49

Cited by: 1

Related to: 10