Work

Effects of Residual Stress on the Ferroelectric Properties of Al0.8Sc0.2N Films Sandwiched Between Pt or W Electrodes

Year: 2025

Type: article

Source: IEEE Transactions on Electron Devices

DOI: 10.1109/ted.2025.3545391

Authors: Xiaoxi Li, Yuan Fang, Bochang Li, Jiuren Zhou, Zhifan Wu, Cizhe Fang, Xiangyu Zeng, Siying Zheng, Yue Hao, Yan Liu, Genquan Han

Institution: Xidian University

Language: English

Topic: Ferroelectric and Negative Capacitance Devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Natural Science Foundation of China, China Postdoctoral Science Foundation, Fundamental Research Funds for the Central Universities

Awards: G1311738338, G4196760632, G441703290, G6081603033, G7968582096, G821947838, G8553384389

OpenAlex ID: W4408145694

FWCI: 2.079

Cites: 37

Cited by: 9

Related to: 10