Work

Plasma-Free Nitridation for MOSCAPs and GeOI GAAFETs Utilizing Cyclic Passivation of Ozone/Hydrazine With Low Leakage Current, Low Interface Traps, and High Thermal Stability

Year: 2025

Type: article

Source: IEEE Transactions on Electron Devices

DOI: 10.1109/ted.2025.3545401

Authors: Xin-Ren Yu, Jia Yuan Hung, Ta-Chun Cho, William Cheng-Yu Ma, Yao-Jen Lee, Yeong-Her Wang

Institutions: National Cheng Kung University, National Sun Yat-sen University, Taiwan Semiconductor Manufacturing Company (Taiwan), National Yang Ming Chiao Tung University

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funder: National Science and Technology Council

Awards: G4323227456, G6176843618

OpenAlex ID: W4408145720

FWCI: 0.924

Cites: 18

Cited by: 4

Related to: 10