Work

Misalignment in Mechanical Interlocking Heterogeneous Integration: Emergent Behavior and Geometry Optimization

Year: 2025

Type: article

Abstract: This paper addresses the challenge of misalignment in cantilever-based mechanical interlocking structures used for the heterogeneous integration of integrated circuits (ICs). As IC applications expand into flexible and multi-functional platforms, precise alignment becomes critical to maintaining optimal mechanical and electrical performance. We investigate the effects of X and Y misalignment on snap-through forces in cantilever arrays, focusing on their impact on mechanical integrity. The experimental results demonstrate that for X-axis misalignments below 15%, the increase in the required snap-through force is less than 5%. In contrast, Y-axis misalignment shows an even more negligible impact, with less than a 5% reduction in force for up to 20% misalignment. Additionally, through polynomial fits of the model across a range of cantilever angles, this study provides a design template for future exploration of cantilever interactions using nonlinear mechanics while minimizing computational load. These findings offer valuable insights for optimizing misalignment tolerance and improving the design of interlocking structures for IC integration, contributing to the development of robust systems for next-generation IC devices.

Source: Micromachines

DOI: 10.3390/mi16030305

Authors: Matthew Nakamura, Corrisa Heyes, Ethan Rocheville, Kirsten Peterson, Joseph J. Brown

Institution: University of Hawaiʻi at Mānoa

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: gold

Estimated APC paid: $2,534

Funder: Air Force Office of Scientific Research