Work

Electrically tunable GHz acoustic waveguide using Al0.7Sc0.3N thin film

Year: 2025

Type: article

Source: Applied Physics Letters

DOI: 10.1063/5.0257586

Authors: Jiawei Li, Xuankai Xu, Yang Li, Tao Wu

Institutions: Chinese Academy of Sciences, ShanghaiTech University, Shanghai Institute of Microsystem and Information Technology, University of Chinese Academy of Sciences

Language: English

Topic: Acoustic Wave Resonator Technologies

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: Natural Science Foundation of Shanghai, Jiangsu Provincial Key Research and Development Program, National Key Research and Development Program of China

Awards: G1399855030, 压电微机械超声探头声光成像应用, G5055577371

OpenAlex ID: W4408165142

FWCI: 1.895

Cites: 34

Cited by: 8

Related to: 10