Fiber PROES: Phase resolved optical emission spectroscopy via optical fibers for knowledge-based plasma process development and monitoring
Year: 2025
Type: article
Source: Review of Scientific Instruments
DOI: 10.1063/5.0244243
Institution: Ruhr University Bochum
Language: English
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Funder: Deutsche Forschungsgemeinschaft
OpenAlex ID: W4408194173