Decomposition of electron ionization mass spectra and calculation of electron ionization cross sections of Sn x H y for extreme ultraviolet lithography
Year: 2025
Type: article
Source: Physica Scripta
Authors: Yunliang Song, Yuwei Ma, Bowen Li, Ximeng Chen
Institution: Lanzhou University
Language: English
Topic: Atomic and Molecular Physics
Subfield: Atomic and Molecular Physics, and Optics
Field: Physics and Astronomy
Domain: Physical Sciences
Open Access status: closed
Award: G7699314284
OpenAlex ID: W4408231016