Work

Viscous effect on neutral radical spatial distribution in microwave plasma chemical vapor deposition

Year: 2025

Type: article

Source: Journal of Physics D Applied Physics

DOI: 10.1088/1361-6463/adbcbc

Authors: Zhiguo Tian, Bin Liu, Moran Wang

Institution: Tsinghua University

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Natural Science Foundation of China, Tsinghua University

Award: G3357347053

OpenAlex ID: W4408259653

FWCI:

Cites: 48

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Related to: 10