Effect of Deposition and Annealing Temperatures on the Phase Composition of TiO2 Films Obtained by Atomic Layer Deposition from Titanium Tetrachloride and Water
Work
Year: 2025
Type: article
Source: Journal of Structural Chemistry
Cites: 22
Cited by:
Related to: 10
FWCI:
Citation percentile (by year/subfield):
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Sustainable Development Goal Clean water and sanitation
Open Access status: closed