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Generative AI for Improved Defect Detection in Semiconductor Wafers

Year: 2024

Type: conference-paper

Source: Proceedings of the Annual Conference of the IEEE Industrial Electronics Society

DOI: 10.1109/iecon55916.2024.10905182

Authors: Thien Huynh, Duy Truong, Tharindu Bandaragoda

Institutions: Ho Chi Minh City University of Technology, La Trobe University

Language: English

Topic: Industrial Vision Systems and Defect Detection

Subfield: Industrial and Manufacturing Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

OpenAlex ID: W4408282026

FWCI:

Cites: 23

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Related to: 10