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Analysis and Design for Inductively Coupled Plasma Power Source with Multi-level Power Mode

Year: 2024

Type: conference-paper

Source: Proceedings of the Annual Conference of the IEEE Industrial Electronics Society

DOI: 10.1109/iecon55916.2024.10905960

Authors: Chenyue Chen, Jun Ma, Ming Liu

Institution: Shanghai Jiao Tong University

Language: English

Topic: Induction Heating and Inverter Technology

Subfield: Mechanical Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

OpenAlex ID: W4408282190

FWCI:

Cites: 8

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Related to: 10