Work

Performance Improvements in GAA NSFET Devices and Circuits Using a Hybrid Dual-κ Spacer Strategy at 3 nm Node and Beyond

Year: 2025

Type: article

Source: ECS Journal of Solid State Science and Technology

DOI: 10.1149/2162-8777/adbebc

Authors: Meihe Zhang, Lei Cao, Lianlian Li, Qingkun Li, Renjie Jiang, Peng Wang, Yadong Zhang, Jiaxin Yao, Zhaohao Zhang, Qingzhu Zhang, Xinghua Wang, Huaxiang Yin, Jun Luo

Language: English

Topic: Advancements in Semiconductor Devices and Circuit Design

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Natural Science Foundation of China, Youth Innovation Promotion Association of the Chinese Academy of Sciences

Awards: G2637102796, G3056225651, G6170109669, G6860301324

OpenAlex ID: W4408285307

FWCI: 1.366

Cites: 21

Cited by: 6

Related to: 10