A Comprehensive Simulation Study on Cu Trace Damage and Cu/Polyimide Interface Delamination of RDLs in Fan-Out Wafer Level Package Under Hygro-Thermo-Mechanical Loads
Year: 2024
Type: conference-paper
Language: English
Topic: 3D IC and TSV technologies
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Award: G7129027855
OpenAlex ID: W4408325023
