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Semiconductor MEMS WaferBond Membrane Deflection Prediction from Infrared Images Using Deep Learning based Vision Models

Year: 2024

Type: conference-paper

Source: IEEE Electronics Packaging Technology Conference (EPTC)

DOI: 10.1109/eptc62800.2024.10909686

Authors: Fiete Stoll, Adarsh Kaladan, Vikas Dubey, Kevin Diex, Dirk Wünsch, Jan Langer, Monu Mishra, Maik Wiemer

Institutions: Fraunhofer Institute for Electronic Nano Systems, University of Delhi

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4408325258

FWCI: 0.781

Cites: 11

Cited by: 1

Related to: 10