Work

In-Situ Characterization of Plasma Species for Process Optimization and Improvement

Year: 2024

Type: conference-paper

Source: IEEE Electronics Packaging Technology Conference (EPTC)

DOI: 10.1109/eptc62800.2024.10909804

Authors: Djamila Chou, Chloe Schubert, Valentin Ray, Laurent Figuiere, Laurence Capellaro, Nohora Caicedo

Language: English

Topic: Plasma Applications and Diagnostics

Subfield: Radiology, Nuclear Medicine and Imaging

Field: Medicine

Domain: Health Sciences

Open Access status: closed

OpenAlex ID: W4408325507

FWCI: 1.618

Cites: 6

Cited by: 1

Related to: 10