Work

High Spatial Resolution Imaging of Dopants and Impurities for Semiconductor Device Using NanoSIMS

Year: 2024

Type: conference-paper

Source: IEEE Electronics Packaging Technology Conference (EPTC)

DOI: 10.1109/eptc62800.2024.10909954

Authors: Place Junichiro Sameshima, Yoshihiko Nakata, Seishi Akahori, Hideki Hashimoto, Masanobu Yoshikawa

Institution: Toray Research Center, Inc. (Japan)

Language: English

Topic: Ion-surface interactions and analysis

Subfield: Computational Mechanics

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4408325925

FWCI:

Cites: 17

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Related to: 10