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Precise Wavelength Control in Fabry-Perot Filters using Thin Etch Stop Layers

Year: 2024

Type: conference-paper

Source: IEEE Electronics Packaging Technology Conference (EPTC)

DOI: 10.1109/eptc62800.2024.10909838

Authors: Tina Babu Shylaja, Klaas Tack, Deniz Sabuncuoglu Tezcan

Institution: IMEC

Language: English

Topic: Optical Coatings and Gratings

Subfield: Surfaces, Coatings and Films

Field: Materials Science

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4408326145

FWCI:

Cites: 7

Cited by:

Related to: 10