Work

Microdynamic behaviors of Au/Ni-assisted chemical etching in fabricating silicon nanostructures

Year: 2025

Type: article

Source: Applied Surface Science

DOI: 10.1016/j.apsusc.2025.162915

Authors: Wenxuan Wu, Yun Chen, Bin Xie, Hengxu Wu, Liang Cheng, Yuanhui Guo, Chuhao Cai, Maoxiang Hou, Xin Chen

Institution: Guangdong University of Technology

Language: English

Topic: Nanofabrication and Lithography Techniques

Subfield: Biomedical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Natural Science Foundation of China, Basic and Applied Basic Research Foundation of Guangdong Province

Awards: G1752183852, G8089054809, G83585892, G8749309868

OpenAlex ID: W4408327411

FWCI: 10.81

Cites: 43

Cited by: 46

Related to: 10