Work

Impact of localized defects in light scattered by optical components: measurement and analysis

Year: 2025

Type: article

Abstract: Defects and contaminants can be a critical source of performance loss. This paper presents and demonstrates the capabilities of a new SPatially and Angularly Resolved Scatterometry Equipment (SPARSE) designed to measure spatially resolved ARS of optical surfaces. Besides a calibration sample, the measurement results of three samples are detailed here. They show the amount of information accessible from a measurement, including the ability to distinguish between roughness, localized defects, and scratches. The scattered light generated by each of these three types of defects can be quantified independently.

Source: Optics Express

DOI: 10.1364/oe.551695

Authors: Adrien Bolliand, Michel Lequime, Claude Amra, Myriam Zerrad

Language: English

Topic: Surface Roughness and Optical Measurements

Subfield: Computational Mechanics

Field: Engineering

Domain: Physical Sciences

Open Access status: gold

Estimated APC paid: $2,270

Funders: Agence Nationale de la Recherche, Commissariat à l'Énergie Atomique et aux Énergies Alternatives, Thales Group

Awards: eXtreme Low Optical Scattering Mirrors, Imagerie et Détection computationnelles