Work

Design of sandwich-type waveguide grating antenna with ultra-long transmission distance and high directionality

Year: 2025
Type: article
Abstract: In order to make the silicon-based optical phased array(SOPA) have a small divergence angle and high directionality, and achieve high-resolution scanning, this paper proposes a sandwich-type waveguide grating antenna (SWGA) based on the Si-Si3N4-Si3N4 platform, which can achieve an effective transmission distance of 1.22cm and finally obtain a divergence angle of 0.0065°. And it has a high upward directionality of 87.41%. Thanks to its large critical dimension, the proposed structure is suitable for manufacturing in complementary metal oxide semiconductor (CMOS) foundries with deep ultraviolet (DUV) lithography.
Language: English
Open Access status: gold
Estimated APC paid: $1,372
OpenAlex ID: W4408345791
FWCI:
Cites: 23
Cited by:
Related to: 10