Work

Finite Element Modeling of the Sensing Element of a Capacitive Differential Accelerometer

Year: 2024

Type: article

Source: Nano- i Mikrosistemnaya Tehnika

DOI: 10.17587/nmst.26.216-221

Authors: D.M. Grigorev, V.V. Amelichev, S.S. Generalov, A.V. Ilkov

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4408366883

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