Work

Data-Based Iterative Tuning of Feedforward Control With Disturbance Compensation for Dual-Drive Gantry Stages in Wafer Inspection

Year: 2025

Type: article

Source: IEEE Transactions on Industrial Electronics

DOI: 10.1109/tie.2025.3544197

Authors: Taotao Chen, Cuiping Yuan, Min Li, Xiaoyi Huang, Kun Li

Institutions: China University of Geosciences, China Academy of Space Technology, Beijing Institute of Spacecraft Environment Engineering

Language: English

Topic: Iterative Learning Control Systems

Subfield: Control and Systems Engineering

Field: Engineering

Domain: Physical Sciences

SDG: Industry, innovation and infrastructure

Open Access status: closed

Funder: National Natural Science Foundation of China

Award: G5096735596

OpenAlex ID: W4408391668

FWCI: 3.064

Cites: 34

Cited by: 8

Related to: 10