Work

A CMOS-Compatible Composite MEMS Pirani Sensor With a Wide Detection Range and High Sensitivity

Year: 2025

Type: article

Source: IEEE Transactions on Electron Devices

DOI: 10.1109/ted.2025.3547805

Authors: Shaohang Xu, Hanhui Li, Qiming Guo, Meng Shi, Na Zhou, Haiyang Mao

Institutions: Chinese Academy of Sciences, Institute of Microelectronics

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

Funders: National Natural Science Foundation of China, Youth Innovation Promotion Association of the Chinese Academy of Sciences, National Key Research and Development Program of China

Awards: G3337945376, G3392054170, G4962238175, G7586441276, G7760156511, G8281438241

OpenAlex ID: W4408399829

FWCI:

Cites: 25

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