Work

Visualizing Molybdenum Pentachloride Flow During Vapor Deposition Processes Using Absorption Imaging

Year: 2025

Type: article

Source: Applied Spectroscopy

DOI: 10.1177/00037028251325565

Authors: James E. Maslar, Berc Kalanyan

Institutions: National Institute of Standards and Technology, Material Measurement Laboratory

Language: English

Topic: Semiconductor materials and devices

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4408406647

FWCI: 0.462

Cites: 24

Cited by: 2

Related to: 10