Synergistic Plasma Activation-Enabled Low-Temperature Cobalt/SiO2 Hybrid Bonding without Oxide Interfaces
Year: 2025
Type: article
Authors: Xiaoyun Qi, Yufei Bai, Han Yan, Xiaohui Yuan, Yan Ma, Tadatomo Suga, Chenxi Wang
Institutions: Harbin Institute of Technology, Meisei University
Language: English
Topic: 3D IC and TSV technologies
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: closed
Awards: G4521019973, G5796035613, G604931522
OpenAlex ID: W4408454167