Improvement of GaN-Based Device Performance by Plasma-Enhanced Chemical Vapor Deposition (PECVD) Directly Preparing h-BN with Excellent Thermal Management Characteristics
Year: 2025
Type: article
Abstract: As the demand for high voltage levels and fast charging rates in the electric power industry increases, the third-generation semiconductor materials typified by GaN with a wide bandgap and high electron mobility have become a central material in technological development. Nonetheless, thermal management challenges have persistently been a critical barrier to the extensive adoption of gallium-nitride-based devices. The integration of two-dimensional materials into GaN-based applications stands out as a significant strategy for tackling heat-dissipation problems. However, the direct preparation of two-dimensional materials on gallium nitride is rather challenging. In this study, high-quality h-BN was prepared directly on GaN films using plasma-enhanced chemical vapor deposition, which revealed that the introduction of appropriately sized active sites is key to the growth of h-BN. Owing to the high in-plane thermal conductivity of h-BN, the thermal conductivity of the sample has been enhanced from 218 W·m−1 K−1 to 743 W·m−1 K−1. Ultraviolet photodetectors were constructed based on the obtained h-BN/GaN heterostructure and maintained excellent detection performance under high-temperature conditions, with detectivity and responsivity at 200 °C of 2.26 × 1013 Jones and 1712.4 mA/W, respectively. This study presents innovative concepts and provides a foundation for improving the heat-dissipation capabilities of GaN-based devices, thereby promoting their broader application.
Source: Molecules
Authors: Yi Peng, Lingyun Liu, Qingfeng Xu, Yuqiang Luo, Jianzhi Bai, Xifeng Xie, Huanbing Wei, Wenwang Wei, Kai Xiao, Wenhong Sun
Language: English
Subfield: Condensed Matter Physics
Field: Physics and Astronomy
Domain: Physical Sciences
Open Access status: gold
Estimated APC paid: $3,258
Awards: G1018507061, G1396193278, G1617850927, G2138469834, G23445913, G2393105949, G2509004, G258688827, G262996825, G2756682631, G3007891610, G3078904279, G3111713119, G3212682248, G3556073643, G3791257411, G3894182231, G4261529292, G4272040827, G4318337871, G4388218063, G4478197992, G4529709899, G4563126039, G5779947147, G6336814816, G6995865352, G7049409772, G737095880, G7399628728, G7442298438, G7474681821, G7524668483, G7537032198, G7929542987, G81080132, G8151517921, G8156353803, G838205150, G8660706130, G8874027924, G9000335638, G941929258, G996781475
OpenAlex ID: W4408455943