Work

Microfabrication of RF MEMS Switches Through Thin Flim Stress Control

Year: 2025

Type: article

Source: The Journal of Technology Management and Applied Engineering

DOI: 10.31274/jtmae.18457

Author: Qingzhou Xu

Institution: Morehead State University

Language: English

Topic: Advanced MEMS and NEMS Technologies

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4408471968

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