Optimizing microring resonator performance via femtosecond laser: post-fabrication trimming of resonance wavelength and coupling regimes
Year: 2025
Type: article
Abstract: Integrated silicon photonic devices, especially microring resonators, are susceptible to fabrication variations, with even nanoscale errors potentially leading to suboptimal performance, thereby hindering their large-scale production and commercialization. This study demonstrates femtosecond-laser-based post-fabrication trimming of microring resonators, achieving controllable and permanent adjustments to the resonance wavelengths and coupling regimes. Micro-Raman spectroscopy revealed the trimming mechanism, whereas systematic analysis highlighted performance variations among the on-chip devices. The experimental results showed directional resonance wavelength shifts with long-term stability and minimal reduction in the quality factor. The overcoupling devices were tuned to near-critical coupling to improve the extinction ratio exceeding 22 dB. This approach promises to accelerate the industrialization of high-performance, cost-effective photonic devices.
Source: Optical Materials Express
DOI: 10.1364/ome.555571
Authors: Weixiao Xu, Jia Du, Jiang Qu, Hong Wang, Weibiao Chen, Libing Zhou
Language: English
Topic: Photonic and Optical Devices
Subfield: Electrical and Electronic Engineering
Field: Engineering
Domain: Physical Sciences
Open Access status: gold
Estimated APC paid: $1,843
Award: G1924410626
OpenAlex ID: W4408507305