Work

Metrology of the Shape of Large-Size and Aspherical X-ray Mirrors with Subnanometer Accuracy

Year: 2024

Type: article

Source: Journal of Surface Investigation X-ray Synchrotron and Neutron Techniques

DOI: 10.1134/s1027451024701878

Authors: E. V. Petrakov, E. I. Glushkov, A. K. Chernyshev, N. I. Chkhalo

Institutions: Russian Academy of Sciences, Institute for Physics of Microstructures

Language: English

Topic: Advanced Measurement and Metrology Techniques

Subfield: Mechanical Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4408522137

FWCI:

Cites: 30

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Related to: 10