Toward roll-to-roll ALD of thermoelectric Al-doped ZnO thin films on flexible nanostructured PET membranes
Year: 2025
Type: article
Abstract: Thin films are an effective way of manufacturing thermoelectric (TE) sensors for biomedical devices and wearable electronics. Excellent conformality and sub-nanometer thickness control of atomic layer deposition (ALD) make it a promising method of preparing TE thin films on flexible polymer and textile substrates suitable for sensor use. Here, Al-doped ZnO films were deposited on flexible perforated polyethylene terephthalate (PET) templates with 50/1 diethylzinc/trimethylaluminum pulsing ratio at a low temperature of 100 °C. Thermoelectric properties of the resulting nanocomposites were measured. The application potential of the present ALD-made TE coatings on flexible PET films for future roll-to-roll fabrication is discussed.
Source: Applied Physics Letters
DOI: 10.1063/5.0245804
Authors: Esa Alakoski, Sami Kinnunen, Girish C. Tewari, Jaakko Julin, Antti J. Soininen, Maarit Karppinen
Language: English
Topic: ZnO doping and properties
Subfield: Materials Chemistry
Field: Materials Science
Domain: Physical Sciences
Open Access status: green
OpenAlex ID: W4408528565