Improved device performance in in situ SiNx/AlN/GaN MIS-HEMTs with ex situ Al2O3 passivation at elevated temperatures
Year: 2025
Type: article
Source: Applied Physics Letters
DOI: 10.1063/5.0252966
Language: English
Subfield: Condensed Matter Physics
Field: Physics and Astronomy
Domain: Physical Sciences
Open Access status: closed
Awards: G2910609997, G2985421571
OpenAlex ID: W4408545151
