Work

Measurement of Discharge and Plasma Parameters in a Vacuum (Gasless) Magnetron Sputtering System

Year: 2024

Type: article

Source: Bulletin of the Russian Academy of Sciences Physics

DOI: 10.1134/s1062873824710638

Authors: M. V. Shandrikov, M. I. Azhgikhin, A. S. Bugaev, A. A. Cherkasov, P. V. Moskvin, E. M. Oks, K. P. Savkin, K. A. Shcheglov, G. Yu. Yushkov

Institutions: Russian Academy of Sciences, Institute of High Current Electronics

Language: English

Topic: Plasma Diagnostics and Applications

Subfield: Electrical and Electronic Engineering

Field: Engineering

Domain: Physical Sciences

Open Access status: closed

OpenAlex ID: W4408564285

FWCI: 0.208

Cites: 14

Cited by: 2

Related to: 10